A good scanning electron microscope costs at most a few million? And is pretty common in a decently funded lab pretty much anywhere? Resolutions of 5nm is not uncommon. A scanning tunnelling microscope can go much lower (single atom types) and isn’t all that much more expensive either (comparatively I mean).

I think it’s common knowledge by now that the smallest feature in a 5nm chip isn’t really 5nm. So that’s not (yet?) a viable strategy.